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The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b <t>)</t> <t>Reactive</t> Ion Etching <t>(RIE)</t> stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.
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The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b ) Reactive Ion Etching (RIE) stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.

Journal: Scientific Reports

Article Title: 3D coaxial out-of-plane metallic antennas for filtering and multi-spectral imaging in the infrared range

doi: 10.1038/srep28738

Figure Lengend Snippet: The starting template ( a ) is an array of hollow 3D antennas made of polymeric resist (green) obtained by FIB milling, which is coated with a thin gold (yellow) layer. ( b ) Reactive Ion Etching (RIE) stage to remove the gold deposited on the bottom Si 3 N 4 membrane (light blue). ( c ) Atomic Layer Deposition (ALD) stage to deposit a conformal layer of TiO 2 (or SiO 2 , orange). ( d ) Evaporation stage in presence of silane (dark grey) atmosphere. (e) Spin coating stage to deposit the PMMA (dark blue) layer. ( f ) Evaporation of a thin gold layer.

Article Snippet: The removal is performed with Reactive Ion Etching (RIE) stage (Sentech SI 500 ICP-RIE plasma etcher ), applying highly powerful Argon plasma.

Techniques: Membrane, Evaporation